![]() Three dimensional modeling is carried out to accurately capture the characteristic behavior of the device. The analytical prediction has been validated with the finite element method simulation results through PZFlex. ![]() Effects of the variation in membrane thickness, gap separation, and membrane radius on membrane displacement are investigated. Circular membrane approximation model has been considered. Mason’s modeling techniques are used to evaluate the membrane displacement. To determine the equivalent capacitance of the device, the capacitances of the membrane, gap and silicon nitride insulating layer are associated in series. The capacitance value of the device is evaluated based on Younes Ataiiyan’s method. CMUT is used as a medical imaging component which can be an important module for sustainable healthcare system. ![]() This paper models the fringing field effects in a capacitive micromachined ultrasonic transducer (CMUT) structure for determining the sensitivity of the device.
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